| Model |
IM-8001 |
| Type |
Controller |
| Image sensor |
1" 20-megapixel monochrome CMOS |
| Display |
12.1" LCD monitor (WXGA: 1280 × 800) |
| Receiver lens |
Double telecentric lens |
| Image measurement |
Field of view |
Wide-field measurement mode |
IM-8005: ø100 mm ø3.94"
IM-8020: 200 × 200 mm 7.87" × 7.87" (4× R50 R1.97")
IM-8030: 300 × 200 mm 11.81" × 7.87" (4× R50 R1.97") |
| High-precision measurement mode |
IM-8005: 25 × 25 mm 0.98" × 0.98"
IM-8020: 125 × 125 mm 4.92" × 4.92"
IM-8030: 225 × 125 mm 8.86" × 4.92" |
| Minimum display unit |
0.1 μm |
| Repeatability |
Wide-field measurement mode |
Without stage movement |
±1 μm |
| With stage movement |
IM-8005: —
IM-8020: ±2 μm
IM-8030: ±2 μm |
| High-precision measurement mode |
Without stage movement |
±0.5 μm |
| With stage movement |
IM-8005: —
IM-8020: ±1.5 μm
IM-8030: ±1.5 μm |
| Measurement accuracy (±2σ) |
Wide-field measurement mode |
Without binding |
±3.9 μm *1 |
| With binding |
IM-8005: —
IM-8020: ±(7 + 0.02 L) μm *2
IM-8030: ±(7 + 0.02 L) μm *3 |
| High-precision measurement mode |
Without binding |
±2 μm *4 |
| With binding |
IM-8005: —
IM-8020: ±(4 + 0.02 L) μm *5
IM-8030: ±(4 + 0.02 L) μm *6 |
| Outer diameter measurement |
Measurement accuracy |
Wide-field measurement mode |
IM-8005: ±(2.8 + 0.02 D) μm *7
IM-8020: ±(2.8 + 0.02 D) μm *8
IM-8030: ±(2.8 + 0.02 D) μm *9 |
| High-precision measurement mode |
IM-8005: ±(1.4 + 0.04 D) μm *10
IM-8020: ±(1.4 + 0.04 D) μm *11
IM-8030: ±(1.4 + 0.04 D) μm *12 |
| Light probe measurement |
Measurable area (XY) |
IM-8005: —
IM-8020: 90 × 90 mm 3.54" × 3.54"
IM-8030: 190 × 90 mm 7.48" × 3.54" |
| Maximum measurement depth |
IM-8005: —
IM-8020: 30 mm 1.18"
IM-8030: 30 mm 1.18" |
| Light probe diameter |
IM-8005: —
IM-8020: ø3 mm ø0.12"
IM-8030: ø3 mm ø0.12" |
| Measuring force |
IM-8005: —
IM-8020: 0.015 N
IM-8030: 0.015 N |
| Repeatability |
IM-8005: —
IM-8020: ±2 μm *13
IM-8030: ±2 μm *13 |
| Measurement accuracy |
IM-8005: —
IM-8020: ±(8 + 0.02 L) μm *14
IM-8030: ±(8 + 0.02 L) μm *15 |
| External remote input |
Non-voltage input (with and without contact) |
| External output |
OK/NG/FAIL/MEAS. |
PhotoMos output
Rated load: 24 VDC 0.5 A
ON resistance: 50 mΩ or lower |
| Interface |
LAN |
RJ-45 (10BASE-T/100BASE-TX/1000BASE-T) |
| USB 3.1 |
4 ports (rear: 4) |
| USB 2.0 series A |
4 ports (front: 2, rear: 2) |
| Monitor output |
DVI-D |
| Record |
Hard disk drive |
500 GB |
| Illumination system |
Transparent |
Telecentric transparent illumination |
| Ring |
IM-8005: Four division ring illumination
IM-8020: Four division, multi-angle illumination (electric), Slit ring (directivity) illumination (electric)
IM-8030: Four division, multi-angle illumination (electric), Slit ring (directivity) illumination (electric) |
| XY stage |
Moving range |
IM-8005: —
IM-8020: 100 × 100 mm 3.94" × 3.94" (electric)
IM-8030: 200 × 100 mm 7.87" × 3.94" (electric) |
| Withstand load |
IM-8005: 5 kg
IM-8020: 5 kg
IM-8030: 7.5 kg |
| Z stage |
Moving range |
75 mm 2.95" (electric) |
| Power supply |
Power voltage |
100 to 240 VAC ±10%, 50/60 Hz |
| Power consumption |
430 VA or lower |
| Environmental resistance |
Ambient temperature |
+10 to 35°C +50°F to 95°F |
| Relative humidity |
20 to 80% RH (no condensation) |
| Overvoltage category |
II |
| Pollution degree |
2 |
| Weight |
Approx. 8 kg |
*1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F at the focal point position.
*2 In the range of 180 × 180 mm 7.09" × 7.09" (4× R40 R1.57"), within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F at the focal point position, and with a load weighing 2 kg or less on the stage. L is the amount of stage movement (in mm inch).
*3 In the range of 280 × 180 mm 11.02" × 7.09" (4× R40 R1.57"), within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F at the focal point position, and with a load weighing 3 kg or less on the stage. L is the amount of stage movement (in mm inch).
*4 In the range of ø20 mm 0.79", within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F at the focal point position.
*5 In the range of 120 × 120 mm 4.72" × 4.72", within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F at the focal point position, and with a load weighing 2 kg or less on the stage. L is the amount of stage movement (in mm inch).
*6 In the range of 220 × 120 mm 8.66" × 4.72", within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F at the focal point position, and with a load weighing 3 kg or less on the stage. L is the amount of stage movement (in mm inch).
*7 Within the range of L18 mm × ø60 mm L0.71" × ø2.36". At the focal point position, with the part positioned in the center of the lens field of view, and with the shaft direction of the part facing the horizontal direction of the lens field of view. Within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F. D is the Y direction distance (in mm inch).
*8 Within the range of L118 mm × ø60 mm L4.65" × ø2.36". At the focal point position, with the part positioned in the center of the lens field of view, and with the shaft direction of the part facing the horizontal direction of the lens field of view. Within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F. D is the Y direction distance (in mm inch).
*9 Within the range of L218 mm × ø60 mm L8.58" × ø2.36". At the focal point position, with the part positioned in the center of the lens field of view, and with the shaft direction of the part facing the horizontal direction of the lens field of view. Within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F. D is the Y direction distance (in mm inch).
*10 Within the range of L6 mm × ø20 mm L0.24" × ø0.79". At the focal point position, with the part positioned in the center of the lens field of view, and with the shaft direction of the part facing the horizontal direction of the lens field of view. Within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F. D is the Y direction distance (in mm inch).
*11 Within the range of L106 mm × ø20 mm L4.17" × ø0.79". At the focal point position, with the part positioned in the center of the lens field of view, and with the shaft direction of the part facing the horizontal direction of the lens field of view. Within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F. D is the Y direction distance (in mm inch).
*12 Within the range of L206 mm × ø20 mm L8.11" × ø0.79". At the focal point position, with the part positioned in the center of the lens field of view, and with the shaft direction of the part facing the horizontal direction of the lens field of view. Within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F. D is the Y direction distance (in mm inch).
*13 When the detection system is standard. If the detection system is at a deep position, ±3 μm.
*14 When the detection system is standard, within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F, and with a load weighing 2 kg or less on the stage. If the detection system is at a deep position, ±(10 + 0.02 L) μm with L as the measurement length (in mm inch).
*15 When the detection system is standard, within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F, and with a load weighing 3 kg or less on the stage. If the detection system is at a deep position, ±(10 + 0.02 L) μm with L as the measurement length (in mm inch). |
