Model | IM-8030T | |||
Type | Head | |||
Image sensor | 1" 20-megapixel monochrome CMOS | |||
Display | 12.1" LCD monitor (WXGA: 1280 × 800) | |||
Receiver lens | Double telecentric lens | |||
Image measurement | Field of view | Wide-field measurement mode | 300 × 200 mm 11.81" × 7.87" (4× R50 R1.97") | |
High-precision measurement mode | 225 × 125 mm 8.86" × 4.92" | |||
Minimum display unit | 0.1 μm | |||
Repeatability | Wide-field measurement mode | Without stage movement | ±1 μm | |
With stage movement | ±2 μm | |||
High-precision measurement mode | Without stage movement | ±0.5 μm | ||
With stage movement | ±1.5 μm | |||
Measurement accuracy (±2σ) | Wide-field measurement mode | Without binding | ±3.9 μm *1 |
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With binding | ±(7 + 0.02 L) μm *2 |
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High-precision measurement mode | Without binding | ±2 μm *3 |
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With binding | ±(4 + 0.02 L) μm *4 |
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Outer diameter measurement | Measurement accuracy | Wide-field measurement mode | ±(2.8 + 0.02 D) μm *5 |
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High-precision measurement mode | ±(1.4 + 0.04 D) μm *6 |
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Light probe measurement | Measurable area (XY) | 190 × 90 mm 7.48" × 3.54" | ||
Maximum measurement depth | 30 mm 1.18" | |||
Light probe diameter | ø3 mm ø0.12" | |||
Measuring force | 0.015 N | |||
Repeatability | ±2 μm *7 |
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Measurement accuracy | ±(8 + 0.02 L) μm *8 |
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Height Measurement Unit | Measurement range | 0 to 75 mm 0 to 2.95" | ||
Measuring force | 0.3 N | |||
Measurement accuracy (XY) | ±0.2 mm 0.0079"*9 |
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Minimum display unit | 1 μm | |||
Measurable area (XY) | Wide-field measurement mode | 145 × 95 mm 5.71" × 3.74" | ||
High-precision measurement mode | 107.5 × 95 mm 4.23" × 3.74" | |||
Repeatability | ±2 μm *10 |
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Measurement accuracy | ±7.5 μm *11 |
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External remote input | Non-voltage input (with and without contact) | |||
External output | OK/NG/FAIL/MEAS. | PhotoMos output |
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Interface | LAN | RJ-45 (10BASE-T/100BASE-TX/1000BASE-T) | ||
USB 3.1 | 4 ports (rear: 4) | |||
USB 2.0 series A | 4 ports (front: 2, rear: 2) | |||
Monitor output | DVI-D | |||
Record | Hard disk drive | 500 GB | ||
Illumination system | Transparent | Telecentric transparent illumination | ||
Ring | Four division, multi-angle illumination (electric), Slit ring (directivity) illumination (electric) | |||
XY stage | Moving range | 200 × 100 mm 7.87" × 3.94" (electric) | ||
Withstand load | 7.5 kg | |||
Z stage | Moving range | 75 mm 2.95" (electric) | ||
Power supply | Power voltage | 100 to 240 VAC ±10%, 50/60 Hz | ||
Power consumption | 430 VA or lower | |||
Environmental resistance | Ambient temperature | +10 to 35°C +50°F to 95°F | ||
Relative humidity | 20 to 80% RH (no condensation) | |||
Overvoltage category | II | |||
Pollution degree | 2 | |||
Weight | Approx. 35 kg | |||
*1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F at the focal point position. |