Описание
Type
| Dopant | Orientation | Diameter mm | Consistency cm-3 | Resistiity Ωcm | Mobility cm2/Vs | Dislocation Density 1/cm2 |
|---|---|---|---|---|---|---|---|
LEC - 50 |
-- | <100> | Φ 50.8 | -- | ≥ 1 × 107 |
≥ 5,000 | ≤ 50,000 |
LEC - 50Cr |
Cr | ||||||
LEC - 76 |
-- | <100> | Φ 76.2 | -- | ≥ 1 × 107 |
≥ 5,000 | ≤ 50,000 |
LEC - 76Cr |
Cr | ||||||
LEC - 76Si |
Si | <100> | Φ 76.2 | ≥ 1 × 1018 |
-- | ≥ 1,500 | ≤ 10,000 |
LEC - 76Cr |
Cr | ≥ (5 ~ 40) × 1017 |
-- | ||||
HB - 50Si |
Si | <100> | Φ 50.8 | ≥ 1 × 1018 |
-- | ≥ 1,300 | ≤ 1,000 |
HB - 50Cr |
Cr | -- | ≥ 5 × 107 |
≥ 1,500 | ≤ 5,000 |
Документы
GaAsWafers-20201816678
142.8 Кб
